Compact apparatus and method for storing and loading semiconductor wafer carriers

Kompakte Vorrichtung und Methode zum Aufbewahren und Laden von Halbleiterscheibeträgern

Appareil compact et méthode de stockage et de chargement de supports de galettes semi-conductrices

Abstract

An improved apparatus and method is provided for storing semiconductor wafer carriers, and for loading wafers or wafer carriers to a fabrication tool (33). The apparatus comprises a plurality of storage locations (25a, 25b, 25c, 25d) positioned above the fabrication tool. The apparatus receive wafer carriers (296) via a factory load port. The wafer carriers are transported between the factory load port and the storage locations via a first robot (13), and are transported between the fabrication tool load port and the storage locations via a second robot (15). Both robots access the respective load port (27) from overhead, thus eliminating the need for a front loader robot, and reducing the apparatus' footprint. Each robot may access overhead factory transportation systems to provide further flexibility in wafer carrier transport. Additionally, the apparatus of the present invention may include a mechanism for opening pod type wafer carriers and for extracting wafers therefrom.

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Cited By (6)

    Publication numberPublication dateAssigneeTitle
    EP-1096550-A1May 02, 2001Chartered Semiconductor Manufacturing Pte Ltd.Improved semiconductor manufacturing system
    US-6354781-B1March 12, 2002Chartered Semiconductor Manufacturing CompanySemiconductor manufacturing system
    WO-0068975-A2November 16, 2000Infineon Technologies AgDispositif destine a la fabrication de produits a semi-conducteur
    WO-0068975-A3April 05, 2001Infineon Technologies Ag, Ronald Huber, Klaebsch Rolf ArnoSystem for manufacturing semiconductor products
    WO-03046954-A2June 05, 2003Ortner C.L.S. GmbhStorage device
    WO-03046954-A3August 28, 2003Ortner C L S Gmbh, Karsten Budach, Heinz Martin Esser, Hubert JarnigStorage device